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Structure, Composition, and Morphology of Photoelectrochemically Active TiO2-xNx Thin Films Deposited by Reactive DC Magnetron Sputtering
(American Chemical Society, 2004)
Films of nitrogen-doped TiO2 were made by reactive DC magnetron sputtering in a mixture of argon, oxygen, and nitrogen. The nitrogen gas ratio Φ was varied in the 0 < Φ < 0.025 range during the depositions, resulting in ...